*FREE* Nanoimprint Lithography : Principles, Processes & Materials pdf, epub, mobi
Par burgess albert le vendredi, septembre 29 2017, 12:05 - Lien permanent
Hongbo Lan,Yucheng Ding,Hongzhong Liu: Nanoimprint Lithography : Principles, Processes & Materials
Description
Lithography, the fundamental fabrication process of semiconductor devices, has been playing a critical role in micro-nanofabrication technologies and manufacturing of Integrated Circuits (IC). This book gives fresh insight to NIL, one of the most promising low-cost, high-throughput technologies for manufacturing nanostructures.
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Author: Hongbo Lan,Yucheng Ding,Hongzhong Liu
Number of Pages: 73 pages
Published Date: 23 Aug 2011
Publisher: Nova Science Publishers Inc
Publication Country: New York, United States
Language: English
ISBN: 9781611225013
Download Link: Click Here
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